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Handbook of semiconductor silicon technology

Author: William C O'Mara; Robert B Herring; Lee Philip Hunt
Publisher: Park Ridge, N.J. : Noyes Publications, ©1990.
Series: Materials science and process technology series.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

A comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. It details various known properties of silicon. It includes a set of binary phase diagrams. It  Read more...

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Genre/Form: Handbooks and manuals
Handbooks, manuals, etc
Document Type: Book
All Authors / Contributors: William C O'Mara; Robert B Herring; Lee Philip Hunt
ISBN: 0815512376 9780815512370
OCLC Number: 925268322
Description: xx, 795 s. : illustrations.
Contents: Silicon Precursors: Their Manufacture and PropertiesPolysilicon PreparationCrystal Growth of SiliconSilicon Wafer PreparationSilicon EpitaxySilicon Material PropertiesOxygen, Carbon and Nitrogen in SiliconCarrier Lifetimes in SiliconPreparation and Properties of Polycrystalline-Silicon FilmsSilicon Phase DiagramsReferencesIndex
Series Title: Materials science and process technology series.
Other Titles: Semiconductor silicon technology.
Responsibility: edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
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"...comprehensive, up-to-date book..." - SAMPE Journal

 
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