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  E-mail Message: I thought you might be interested in this item at http://pcc.worldcat.org/oclc/560445767 Title: Silicon carbide micro electromechanical systems for harsh environments Author: Rebecca Cheung Publisher: London : Imperial College Press, ©2006. ISBN/ISSN: 1860949096 9781860949098 OCLC:560445767

  
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Subjects

• Microelectromechanical systems.
• Silicon carbide.
• TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
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Silicon carbide micro electromechanical systems for harsh environments

Author:	Rebecca Cheung
Publisher:	London : Imperial College Press, ©2006.
Edition/Format:	eBook : EnglishView all editions and formats
Summary:	Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.  Read more...